发明名称 |
Method of manufacturing a semiconductor device having flexible wiring substrate |
摘要 |
Peeling between a molding resin and a substrate is prevented to improve the quality of a semiconductor device. A film substrate capable of being deformed following shrinkage upon curing of a molding resin and having plural partitioned device areas is provided. Then, a block molding is performed so as to cover the plural device areas in a lump on a chip bearing surface side of the film substrate. Thereafter the film substrate is subjected to dicing wherein a cutting blade is advanced toward a block molding portion to divide the film substrate device area by device area in accordance with a down cutting method, whereby peeling of the substrate in the dicing work can be prevented.
|
申请公布号 |
US6649448(B2) |
申请公布日期 |
2003.11.18 |
申请号 |
US20010961368 |
申请日期 |
2001.09.25 |
申请人 |
HITACHI, LTD.;HITACHI HOKKAI SEMICONDUCTOR, LTD. |
发明人 |
TOMIHARA SEIICHI |
分类号 |
H01L23/12;H01L21/301;H01L21/56;H01L21/58;H01L23/31;H01L23/498;H05K3/00;H05K3/24;H05K3/28;(IPC1-7):H01L21/48 |
主分类号 |
H01L23/12 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|