| 摘要 |
PROBLEM TO BE SOLVED: To provide a displacement detecting device superior in stability with the lapse of time, and suitable for reducing the size and weight. SOLUTION: This displacement detecting device has a light source 51 for emitting the light, a polarized light separating part 58 for generating the synthetic light by synthesizing the two light reflected from an external optical system by emitting the light emitted from the light source 51 to the external optical system by separating the light into the two light mutually different in a polarized light component, a phase plate 43 arranged between the light source 51 and the polarized light separating part 58, and introducing the light to the polarized light separating part 58 by changing a polarized light state of the light emitted from the light source 51, a light branching film 59 for dividing the synthetic light generated by the polarized light separating part 58 into a plurality, a polarized light part 42 for respectively passing only a prescribed polarized light component on the divided synthetic light, and a light receiving element 52 for generating an interference signal by respectively photoelectrically converting the interference light passing through the polarized light part 42. COPYRIGHT: (C)2004,JPO
|
