Flushing vessel with ultra-clean liquid,申请号EP20000410075-传众专利搜索

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发明名称	Flushing vessel with ultra-clean liquid
摘要
申请公布号	EP1075878(B1)	申请公布日期	2003.11.12
申请号	EP20000410075	申请日期	2000.07.12
申请人	VACO MICROTECHNOLOGIES	发明人	ORAVEC, VICTORIA
分类号	B08B3/10;B08B3/12;H01L21/304;H01L21/306;(IPC1-7):B08B3/10	主分类号	B08B3/10
代理机构		代理人
主权项
地址

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