| 摘要 |
<p>A sticking device for flat panel substrate, wherein both holding plates (1, 2) are adjustably moved relative to each other in XYθ directions by a positioning moving means (8) disposed on the outside of a closed space (S) while maintaining the closed space (S) in vacuum state by maintaining clearances between the peripheral edge parts (1a, 2a) of both holding plates (1, 2) in sealed state by moving seal means (4) so that positioning adjustment means (5) are moved in the same direction to position both substrates (A, B) relative to each other and that the clearance between the peripheral edge parts (1a, 2a) of both holding plates (1, 2) is held at a specified clearance by the large rigidity of the positioning adjusting means (5) in Z direction, whereby a support resistance applied to the moving seal means (4) can be maintained at a proper value, and both substrates can be smoothly moved for alignment from the outside in XYθ direction in vacuum without using an XYθ stage.</p> |
