Gas concentration sensor

摘要

A gas concentration sensor comprises an ultrasonic element 33 opposite a reflection surface 34. A depression 34a is formed on an edge portion of a reflection surface 34 which is in contact with a side wall of a measurement chamber 32 such that a bottom surface of the depression 34a is substantially in parallel with the reflection surface 34. The distance between the ultrasonic element 33 and the edge portion of the reflection surface 34 becomes greater than the distance between the ultrasonic element 33 and a central portion of the reflection surface 34. As a result, an indirect wave-which impinges obliquely on the side wall of the measurement chamber 32 and propagates along the side wall-is reflected from the bottom surface of the depression 34a and propagates. Thus, the propagation distance of this indirect wave becomes greater as compared to the case where the reflection surface 34 is flat, so that the indirect wave is not combined with a direct wave in the vicinity of a modulation point of the direct wave. That is, since the modulation point of the direct wave can be detected accurately, a time interval between a modulation point of a transmitted wave and that of a received wave can be measured as the propagation time of an ultrasonic wave, thereby enabling accurate determination of gas concentration.