| 摘要 |
The present invention provides a probe card comprising a substrate and an external connection terminal located on substrate, wherein external connection terminal 1 is separated from a body of substrate by conductors attached to the substrate, whereby the waiting time due to dielectric absorption can be constantly shortened, and the steady-state leakage current can be stably reduced, thereby enhancing the accuracy of measuring microcurrents and determining microcurrent fluctuations for semiconductor wafer testing devices.
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