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经营范围
发明名称
Polishing apparatus
摘要
申请公布号
EP0761387(B1)
申请公布日期
2003.10.29
申请号
EP19960113413
申请日期
1996.08.21
申请人
EBARA CORPORATION
发明人
TOGAWA, TETSUJI;SAKURAI, KUNIHIKO;KIKUTA, RITSUO
分类号
H01L21/304;B24B37/04;B24B51/00;B24B53/007;(IPC1-7):B24B37/04
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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