| 摘要 |
PROBLEM TO BE SOLVED: To provide an SPM sensor which is provided with a holding part, a cantilever and a sensor tip, in which the sensor tip protrudes from a face of the cantilever at a free end part of the cantilever and in which the cantilever and the three-face sensor tip are composed of single-crystal (100) silicon and to provide a method of manufacturing the SPM sensor. SOLUTION: The manufacturing method uses a low-cost process step and a wet chemical etching step at a mainframe, and the SPM sensor which is provided with the rectangular cantilever having the tip protruding or not protruding from the free end part is manufactured from a single object. COPYRIGHT: (C)2004,JPO |
