| 摘要 |
<p>Nanowire devices are provided based on carbon nanotubes or single-crystal semiconductor nanowires. The devices includes: electrodes (14) patterned on a substrate; catalyst sites (20) formed on the electrodes (14); nanowires grown at the catalyst sites (20) through chemical vapor deposition techniques; and an insulator layer filling the spaces between the nanowires. The insulator may be planarized using chemical-mechanical polishing or other suitable techniques. The resulting nanowire device may be used in chemical or biological sensors, field emitter for displays, or for other applications.</p> |
