| 摘要 |
<p>A conditioning tool is useful for treating the polishing surface of a polishing pad. The tool has a base for supporting conditioning materials. The base has an abrasive section for cutting a polishing surface of the polishing pad and a polymeric section for treating the polishing surface of the polishing pad. The polymeric section is operable in a first position with only the polymeric section in contact with the polishing surface of the polishing pad and operable in a second position with the abrasive section in contact with the polishing surface of the polishing pad.</p> |
