| 摘要 |
PROBLEM TO BE SOLVED: To provide an appearance-inspecting method and an appearance-inspecting apparatus that can normally inspect a location that should be inspected and discriminated and at the same time has a wide visual field range of an optical system and a side photographing range. SOLUTION: The appearance-inspecting apparatus and method comprise an inspection target 2, a photographing means 4 for transmitting the photograph image of the inspection target 2 as image data, and an image-processing apparatus 5 having a function for analyzing image data from the photographing means 4 for judging whether the appearance of the inspection target 2 conforms or not, thus inspecting the appearance of the inspection target 2 by the conformance judgment by the image-processing apparatus 5. The optical system to the inspection target 2 is set to be an optical system 7 that has a high magnification and a large numerical aperture, and the image of the inspection target 2 from the optical system 7 is photographed by the photographing means 4 through an optical system 8 having a reduced magnification. As a result, fine projections and recesses 10 of the inspection target 2 are imaged to a bright image having a small shading difference, and an inspection region 12 is imaged to an image having a large shading difference, thus performing accurate conformance judgment and expanding a photographing range. COPYRIGHT: (C)2004,JPO
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