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发明名称
Tunable Fabry-Perot microelectromechanical resonator with optical power-dependent tuning
摘要
申请公布号
EP1204181(A3)
申请公布日期
2003.10.15
申请号
EP20010116944
申请日期
2001.07.11
申请人
AGILENT TECHNOLOGIES, INC. (A DELAWARE CORPORATION)
发明人
TUCKER, RODNEY S.;SORIN, WAYNE V.
分类号
G01J3/26;G02B26/00;G02B26/02;H01S3/08;H01S5/14;(IPC1-7):G01J3/26;G01J9/02;H01S5/068;H01S3/086
主分类号
G01J3/26
代理机构
代理人
主权项
地址
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