| 摘要 |
<p>A ferroelectric thin film consisting of at least two kinds of material solutions is uniformly mixed in a film-thickness direction within a plane in a substrate. Or, it is mixed so that material solutions are distributed in a film-thickness direction within a plane. Two kinds of material solutions (105, 106) are selectively jetted via separate inkjet heads in constant jetting amounts by an inkjet device having at least two inkjet heads to thereby produce a uniformly-mixed ferroelectric thin film within one plane, and this step is repeated to produce a ferroelectric thin film uniformly mixed also in a thin-film-thickness direction. Changing a jetting amount in a film-thickness direction and an in-plane direction can produce a ferroelectric thin film mixed so that material solutions are properly distributed.</p> |
