发明名称 |
Method and apparatus for actuation of a two-axis MEMS device using three actuation elements |
摘要 |
Apparatus and methods are provided for driving a two-axis MEMS mirror using three non-contact actuation elements or electrodes. A differential bi-directional mirror control uses unipolar drive voltages biased at a suitable value. Transformation functions map two-axis tip-tilt commands to three actuation drive signals for selected electrode orientations and sizes.
|
申请公布号 |
US2003189389(A1) |
申请公布日期 |
2003.10.09 |
申请号 |
US20020093318 |
申请日期 |
2002.03.06 |
申请人 |
GLIMMERGLASS NETWORKS, INC. |
发明人 |
FERNANDEZ ANDRES;DICKSON WILLIAM C. |
分类号 |
G02B26/08;B81B3/00;G02B;G02B26/10;H02N1/00;(IPC1-7):H02N1/00 |
主分类号 |
G02B26/08 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|