| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining method which can reduce a deviation amount of a hole. <P>SOLUTION: A work object in which a plurality of unit regions arranged in a matrix state are patterned on the surface and a plurality of machining spots are patterned in each unit region is prepared. A hole is formed by scanning the laser beam after selecting one unit region from a plurality of the unit regions and by making the laser beam incident on a plurality of the machining spots in the unit regions. The holes are formed at the machining spots in all the unit regions by repeating the process. At this time, a plurality of the unit regions are selected in turn so as not to successively select the unit regions adjacent in a column direction or in a row direction. <P>COPYRIGHT: (C)2004,JPO</p> |
