PLASMA TREATMENT APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a plasma treatment apparatus which treats a large-area substrate or a rectangular substrate even when using reactive plasma. SOLUTION: The plasma treatment apparatus comprises a rectangular waveguide 1, a waveguide antenna 2 comprising slits formed in an H-face of the waveguide 1, an electromagnetic radiation window 4 formed of a dielectric substance, and a dielectric space 10 sandwiched between the waveguide antenna 2 and the electromagnetic radiation window 4. The plasma treatment apparatus produces plasma by electromagnetic waves radiated from the waveguide antenna 2 through the electromagnetic radiation window 4. The face of the waveguide 1 which faces the electromagnetic radiation window 4 is formed with an irregular section 11. COPYRIGHT: (C)2004,JPO