| 摘要 |
PROBLEM TO BE SOLVED: To provide an actuator in which the influence of a high-order resonance frequency component in the pitch direction which is harmful to high speed operation is reduced. SOLUTION: The biaxial actuator is furnished with a movable part 100 having a lens holder, an objective lens, etc., an actuator base part 230 having a magnetic circuit, etc., and a holding part 200 having a holding block injected with a damping material therein and a substrate for connecting the holding part adhered to the holding block, and constituted so that the movable part and the holding part are connected with four support wires 240, and the actuator base part and the holding part are connected by a horizontally arranged leaf spring 260. COPYRIGHT: (C)2004,JPO
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