| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electrostatic chuck having a stable absorbability as well as a dielectric layer capable of attaining an intended stable low volume resistivity by thermal spray in ambient atmosphere without lowering a withstand voltage thereof. <P>SOLUTION: The electrostatic chuck 1 provided with a base stand 2 the surface of which consists of at least an insulating body, an electrode layer 3 formed on the base stand 2 and the dielectric layer 4 formed on the electrode layer 3 by means of thermal spraying in the ambient atmosphere. The dielectric layer 4 comprises Al<SB>2</SB>O<SB>3</SB>that is substantially a chief ingredient, and a resistivity adjusting ingredient comprises TiO<SB>2</SB>that is substantially a chief ingredient and the metal of the group 5a in the periodic table. <P>COPYRIGHT: (C)2004,JPO |
