发明名称 |
Multi-beam polygon scanning system |
摘要 |
A polygon scanning system and method is provided wherein two or more light beams impinge at different incident angles on a polygon facet and are sequentially used for scanning the surface of a substrate as the polygon is rotated. Embodiments include a system comprising a polygon having a reflective facet, a rotation mechanism for rotating the polygon, and a light source for directing a plurality of light beams to impinge on the facet such that each light beam impinges on the facet at a different incident angle. Each light beam is reflected by the facet to scan a particular portion of a surface of a substrate during a respective time interval when the rotation mechanism is rotating the polygon. Each of the plurality of light beams is reflected onto the substrate surface using a respective portion of the facet surface, such that the sum of the respective portions of the facet surface used to reflect the light beams is a very large percentage of the total surface area. Thus, the system has a duty cycle of close to 100 percent as well as a high data rate.
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申请公布号 |
US2003184835(A1) |
申请公布日期 |
2003.10.02 |
申请号 |
US20020043274 |
申请日期 |
2002.01.14 |
申请人 |
GOLDBERG BORIS;REINHORN SILVIU |
发明人 |
GOLDBERG BORIS;REINHORN SILVIU |
分类号 |
B41J2/44;B41J2/47;G01R31/305;G02B26/10;G02B26/12;H04N1/036;H04N1/113;(IPC1-7):G02B26/08 |
主分类号 |
B41J2/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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