| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma treatment method which can perform cleaning according to degrees of contamination, a system for judging cleaning, a system for selecting a cleaning recipe, a program, and an information memory medium. SOLUTION: The plasma treatment method includes a process step of detecting the degrees of the contamination within a plasma treatment chamber 10, and a process step of judging whether the cleaning is performed or not in accordance with the degrees of the contamination and criteria as to whether the cleaning is to be performed or not. The method further includes a step of selecting the cleaning recipe to be applied in cleaning from among the cleaning recipes in accordance with the degrees of the contamination and a step of performing the cleaning of the plasma treatment chamber in accordance with the selected cleaning recipe in the case of judging the performance of cleaning. COPYRIGHT: (C)2004,JPO
|
