发明名称 METHOD AND APPARATUS FOR PRINTING LARGE DATA FLOWS
摘要 An aspect of the present invention includes a method for patterning a workpiece covered at least partly with a layer sensitive to electromagnetic radiation, comprising the actions of, providing a data representation of at least one image to be imaged onto a plurality of locations of said workpiece, fracturing said data representation into a plurality of field stripes, repeating the actions of rasterizing a first field stripe of said data representation, modulating a modulator according to said rasterized field stripe, imaging said first field stripe onto a plurality of locations of said workpiece, rasterizing a second field stripe of said data representation while imaging said first field stripe onto said plurality of locations of said workpiece, terminating the repetition when a predetermined amount of said image is imaged onto said plurality of locations of said workpiece. Other aspects of the present invention are reflected in the detailed description, figures and claims.
申请公布号 WO03081338(A1) 申请公布日期 2003.10.02
申请号 WO2003SE00462 申请日期 2003.03.19
申请人 MICRONIC LASER SYSTEMS AB;ASML NETHERLANDS B.V.;THUREN, ANDERS;VAN DER MAST, KAREL;BLEEKER, ARNO 发明人 THUREN, ANDERS;VAN DER MAST, KAREL;BLEEKER, ARNO
分类号 G03F7/20;H01L21/027 主分类号 G03F7/20
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