| 摘要 |
PROBLEM TO BE SOLVED: To provide an ink jet recording head, its manufacturing method, and an ink jet recorder in which an ink supply passage can be formed relatively easily with high accuracy. SOLUTION: In the ink jet recording head comprising a channel forming substrate 10 of silicon single crystal in which a pressure generating chamber 12 communicating with a nozzle opening is formed, and a piezoelectric element provided on one surface side of the channel forming substrate 10 through a diaphragm in order to generate a pressure variation in the pressure generating chamber 12, an ink supply passage 14 communicating between one end part of the pressure generating chamber 12 in the longitudinal direction and a reservoir 100, i.e., the common ink chamber of a plurality of pressure generating chambers, is provided in the channel forming substrate 10. The ink supply passage 14 and the pressure generating chamber 12 are farmed by etching the channel forming substrate 10 anisotropically and the ink supply passage 14 is formed prior to formation of the pressure generating chamber 12 thus controlling the shape of the ink supply passage with high accuracy. COPYRIGHT: (C)2003,JPO
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