| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem that desired electrostatic force, displacement and pressure cannot be attained without elevating the driving voltage. SOLUTION: Two pairs (electrode pairs) 14 of a movable electrode 14a and a fixed electrode 14b facing each other are disposed substantially in parallel with a diaphragm 10. The movable electrode 14a is secured to the diaphragm 10 and the fixed electrode 14b is secured to a second substrate 2. The movable electrode 14a is displaced through electrostatic attraction generated between the movable electrode 14a and the fixed electrode 14b thus deforming the diaphragm 10. COPYRIGHT: (C)2003,JPO
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