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发明名称
PLASMA DEVICE
摘要
申请公布号
AU2002238951(A1)
申请公布日期
2003.09.29
申请号
AU20020238951
申请日期
2002.03.18
申请人
TOKYO ELECTRON LIMITED
发明人
NOBUO ISHII
分类号
H01J37/32;(IPC1-7):H05H1/46;H01L21/306;H01L21/205;C23C16/505
主分类号
H01J37/32
代理机构
代理人
主权项
地址
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