METHOD FOR MANUFACTURING LIQUID CRYSTAL DISPLAY

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing liquid crystal display by only six mask steps.

SOLUTION: A driving area 108 and a pixel area 110 are defined by a first mask step. Gates 114/116 and upper electrodes 118 of capacitors on the pixel area are defined by a second mask step. Then using the gates and the upper electrodes as a mask, a source/drain 120, a channel region 122 and a lower electrode 119 are formed by an ion-doping process. A second insulation layer 124 is formed and a first opening 126 is formed by a third mask step. A second conductive layer is formed and a source/drain line 128 comes into contact with the source/drain by a fourth mask step. A dielectric layer 124 is formed and covers the second insulation layer and the second conductive layer. A second opening 132 is formed by a fifth mask step. A pixel electrode 134 is defined by a sixth mask step and comes into electrical contact with the drain line.

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