| 摘要 |
PROBLEM TO BE SOLVED: To provide a workpiece carrying device capable of efficiently feeding workpieces to a work stage, and efficiently carrying processed workpieces to a discharging part. SOLUTION: This workpiece carrying device 10 is provided with a loader 31. The loader 31 is provided with a chuck base member 41 rotatable around a rotation shaft 42, pre-processing chuck parts 51 and 52 provided on the chuck base member 41, post-processing chuck parts 53 and 54 provided at point- symmetric positions around the rotation shaft 42 to the pre-processing chuck parts 51 and 52, and a rotation drive mechanism to rotate the chuck base member 41 by 180 deg. around the rotation shaft 42. On the pre-processing chuck parts 51 and 52, a pushing plate 74 is provided to energize the workpiece to be seated on the chuck on the work stage. COPYRIGHT: (C)2003,JPO
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