发明名称 METHOD FOR PREPARING CHEMICAL ADSORPTION FILM AND SOLUTION FOR PREPARING CHEMICAL ADSORPTION FILM FOR USE THEREIN
摘要 <p>A method for preparing a chemical adsorption film onto the surface of a substrate containing an active hydrogen, characterized in that it comprises treating a metal based surfactant having at least one hydrolyzable group with an metal oxide or a partially hydrolyzed product from a metal alkoxide and water, to form a solution, and contacting the solution with the surface of the substrate. The method allows the combination of rapid formation of a chemical adsorption film with the preparation of a film which is reduced in the content of impurities and having a dense structure.</p>
申请公布号 WO2003076064(P1) 申请公布日期 2003.09.18
申请号 JP2003002902 申请日期 2003.03.12
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