Drainage structure in polishing plant

摘要

Disclosed is a polishing plant comprising a polishing apparatus (30) having a top ring (35) for holding a workpiece and a turn table (33) for polishing a surface of the workpiece held by the top ring; and a cleaning apparatus (50) having cleaning machines for cleaning the workpiece polished by the polishing apparatus (30), wherein at least one drainage pipe connected to the polishing apparatus to discharge a waste liquid from the polishing apparatus and at least one drainage pipe connected to the cleaning apparatus (5) to discharge a waste liquid from the cleaning apparatus are divided into a plurality of drainage pipe lines, depending on the type of waste liquid. By use of the polishing plant of the present invention, a waste liquid treatment can be efficiently conducted.