| 摘要 |
<p>A disk-like member holding device capable of satisfactorily positioning and holding a disk-like member even if the latter has no central through-hole. A base plate (1) is provided with an engaging section (1B), and an abutting section (11) on the side holding the base plate (1) is provided with an engaging section (11B). It is through these engaging sections that the base plate (1) is held in the holding device (10). A mechanical chuck (15) holds the outer periphery of the base plate (1). It holds the base plate (1) by concavely deforming the latter. This makes satisfactory positioning and holding possible even if the base plate (1) has no central through-hole, promoting uniformization of the quality of thin films formed by sputtering. Further, it is possible to enhance close contact between abutting surfaces (1A, 11A) to improve the cooling efficiency of the base plate (1) during sputtering or the like process.</p> |
