发明名称 Cell thickness detection method, cell thickness control system, and manufacturing method for liquid crystal device
摘要 Light is transmitted through a compressing clamp which clamps the liquid crystal display panel 10, and the spectrum of light is obtained by a spectrometer 141. A cell thickness is detected based on a wavelength or a frequency at which the spectrum has the minimum or maximum value. The obtained cell thickness is compared with a desired value, and a pressure control unit 132 supplies the compressing clamp with a fluid in accordance with the result of the comparison.
申请公布号 US6618156(B2) 申请公布日期 2003.09.09
申请号 US20010945341 申请日期 2001.08.30
申请人 SEIKO EPSON CORPORATION 发明人 KUROIWA MASAHIRO
分类号 G01B11/06;G02F1/13;G02F1/1341;G09F9/00;(IPC1-7):G01B11/06 主分类号 G01B11/06
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