| 摘要 |
An electromigration evaluation circuit includes two transfer gates and two measurement terminals. The two measurement terminals are connected respectively to both ends of a to-be-evaluated device. In response to a control signal, each of the transfer gates is connected/disconnected to/from each of the measurement terminals. While performing a test for applying a load current to the to-be-evaluated device, the transfer gates are OFF, thereby electrically disconnecting the measurement terminals from the to-be-evaluated device. Just before or after the test, the transfer gates are ON, thereby electrically connecting the measurement terminals to the to-be-evaluated device. Then, the resistance of the to-be-evaluated device is obtained by an external measurement device. The resistance values which are obtained just before or after the test are compared with each other, so that electromigration resistance of the to-be-evaluated device can be evaluated.
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