| 摘要 |
PROBLEM TO BE SOLVED: To make variation of an electrostatic capacitance of a variable capacitor sufficiently larger and, at the same time, to simplify a control circuit which controls the electrostatic capacitance. SOLUTION: On a substrate 1, a square shallow step 3 is provided and a square deep step 5 is provided at a position which is lower than that of the part 3 by one level. In addition, a mobile electrode 2 is constituted as a cantilever by fixing an electrode pad 2A of the electrode 2 on the fixed end side to a surface 1A of the substrate 1. On the substrate 1, a driving electrode 4 which is extended to the groove bottom 2A of the shallow step 3 from the surface 1A of the substrate 1 is fixed. In addition, a detecting electrode 6 which is extended to a groove bottom 5A of the deep step 5 from the surface 1A of the substrate 1 is also fixed. Thus, an interval W1 between the mobile electrode 2 and the detecting electrode 6 is made wider than that W2 between the mobile electrode 2 and the driving electrode 4. COPYRIGHT: (C)2003,JPO
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