| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a chemical material collecting device and its method capable of stably collecting chemical materials produced in operating a machine, with high accuracy. <P>SOLUTION: This collecting device for the chemical material produced in operating the machine, has an outer chamber keeping the environment that an average content of an organic compound is 10-100 μg/m<SP>3</SP>, and an inner chamber installed in the outer chamber, the machine is operated in the inner chamber, and the produced chemical material is collected by the chemical material collecting means installed in the outer chamber. <P>COPYRIGHT: (C)2003,JPO |
