FERROELECTRIC CAPACITOR POSITIONED ON PROTRUSION OF CONDUCTIVE PLUG HAVING CROSS SECTION SMALLER THAN THAT OF BASE PART OF CONDUCTIVE PLUG AND FABRICATING METHOD THEREFOR

摘要

PURPOSE: A ferroelectric capacitor positioned on a protrusion of a conductive plug having a cross section smaller than that of a base part of the conductive plug and a fabricating method therefor are provided to embody reliable and high performance ferroelectric capacitors by easily patterning electrodes and by maximizing the surface area of a lower electrode. CONSTITUTION: The conductive plug has the base part having the first cross section width and the protrusion(49a) protruding from the base part such that the protrusion has the second cross section width smaller than the first cross section width. A conductive layer is positioned on the protrusion opposite to the base part, composed of the first conductive layer. A ferroelectric material is positioned on the first conductive layer opposite to the protrusion. The second conductive layer is positioned on the ferroelectric material opposite to the first conductive layer.