发明名称 Ferrite magnetic film structure having magnetic anisotropy, method of manufacturing the same, and planar magnetic device employing ferrite magnetic film structure having magenetic anisotropy
摘要 A ferrite magnetic film structure exhibiting a magnetic anisotropy, the ferrite magnetic film structure comprising, a substrate provided on one main surface thereof with a groove-like recessed portion and with a ridge-like projected portion located neighboring to the groove-like recessed portion, and a ferrite magnetic film constituted by a continuous film having a substantially flat upper surface and formed on one main surface of the substrate, wherein the ferrite magnetic film structure meets the following conditions:where "a" is a width of the ridge-like projected portion, b is a width of the groove-like recessed portion, h is a height of step between the groove-like recessed portion and the ridge-like projected portion, t is a thickness of the ferrite magnetic film at the recessed portion, and 1 is a length of the recessed portion and of the projected portion.
申请公布号 US6611035(B2) 申请公布日期 2003.08.26
申请号 US20010985760 申请日期 2001.11.06
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 INOUE TETSUO
分类号 H01F17/00;H01F41/04;H01L23/522;(IPC1-7):H01L43/00 主分类号 H01F17/00
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