发明名称 LIQUID COATING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a liquid coating device capable of adjusting the liquid trickling state generated at a slot opening to the constant state prior to starting of coating and enhancing the uniformity of a quality of a coating film. <P>SOLUTION: In this liquid coating device, the coating film is formed by coating a coating liquid on a surface of an object 4 to be coated while horizontally moving a slot nozzle 20. The device has a liquid-cutting means 36 provided at a liquid-cutting position near a peripheral edge of the object to be coated and carrying out liquid-cutting of the coating liquid remained at the slot opening 27a; and a moving means for moving the slot nozzle 20 such that the slot opening 27a is positioned above the liquid-cutting position. The slot opening 27a is formed with a water repellent surface material and the liquid cutting means 36 is formed with a hydrophilic surface material. Thus, a combination of the relative surface materials is selected. A rocking means for forwardly/rearwardly rocking the slot nozzle 20 at the liquid-cutting position and a washing means 37 for washing the slot opening 27a and a liquid-cutting part 36a of the liquid cutting means 36 are further provided. <P>COPYRIGHT: (C)2003,JPO
申请公布号 JP2003236435(A) 申请公布日期 2003.08.26
申请号 JP20020039404 申请日期 2002.02.18
申请人 HIRATA CORP 发明人 NAGATA YOSHITOSHI
分类号 G03F7/16;B05C5/02;G02F1/13;H01L21/027 主分类号 G03F7/16
代理机构 代理人
主权项
地址