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发明名称
Purification of organometallic or heteroatomic compound, useful in semiconductor manufacture, comprises contacting the compound with hydrogenated getter alloy
摘要
申请公布号
IT1318481(B1)
申请公布日期
2003.08.25
申请号
IT2000MI00892
申请日期
2000.04.20
申请人
SAES GETTERS S.P.A.
发明人
VERGANI GIORGIO;SUCCI MARCO
分类号
B01D;C07F;C23C
主分类号
B01D
代理机构
代理人
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