| 摘要 |
PROBLEM TO BE SOLVED: To provide a reflective projection optical system having a simple configuration and excellent imaging performance, and to provide an exposure device and a method for manufacturing a device. SOLUTION: In the reflective projection optical system which projects a pattern on an object surface on an image surface, an imaging system to form an intermediate image on the way has four or more mirrors arranged so as to fundamentally form a coaxial system while sequentially reflecting light from an object side on the image surface, and directions for forming a reflection angle are the same on the reflection planes of the four or more mirrors. COPYRIGHT: (C)2003,JPO
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