发明名称 |
Electrochemical nanostructuring method and device |
摘要 |
The present invention relates to a method for producing surface-structured substrates, wherein a predetermined defined surface structuring is transferred to the surface of a substrate by activating the substrate surface using at least one fine probe that interacts with the substrate surface, and material of a liquid, solid, or molten salt electrolyte is electrochemically deposited in a selective manner on the regions of the substrate surface that are activated thereby. The invention also relates to a device for surface structuring of substrates.
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申请公布号 |
US2003155246(A1) |
申请公布日期 |
2003.08.21 |
申请号 |
US20030239775 |
申请日期 |
2003.01.22 |
申请人 |
SCHIMMEL THOMAS;OBERMAIR CHRISTIAN;MULLER MATTHIAS;KLINKE CHRISTIAN |
发明人 |
SCHIMMEL THOMAS;OBERMAIR CHRISTIAN;MULLER MATTHIAS;KLINKE CHRISTIAN |
分类号 |
B82B3/00;G01Q60/60;H01L21/288;H01L21/768;(IPC1-7):C25D5/02 |
主分类号 |
B82B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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