发明名称 Electrochemical nanostructuring method and device
摘要 The present invention relates to a method for producing surface-structured substrates, wherein a predetermined defined surface structuring is transferred to the surface of a substrate by activating the substrate surface using at least one fine probe that interacts with the substrate surface, and material of a liquid, solid, or molten salt electrolyte is electrochemically deposited in a selective manner on the regions of the substrate surface that are activated thereby. The invention also relates to a device for surface structuring of substrates.
申请公布号 US2003155246(A1) 申请公布日期 2003.08.21
申请号 US20030239775 申请日期 2003.01.22
申请人 SCHIMMEL THOMAS;OBERMAIR CHRISTIAN;MULLER MATTHIAS;KLINKE CHRISTIAN 发明人 SCHIMMEL THOMAS;OBERMAIR CHRISTIAN;MULLER MATTHIAS;KLINKE CHRISTIAN
分类号 B82B3/00;G01Q60/60;H01L21/288;H01L21/768;(IPC1-7):C25D5/02 主分类号 B82B3/00
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