发明名称 |
Magnetically shielded linear motors, and stage apparatus comprising same |
摘要 |
Stage apparatus are disclosed that provide high-accuracy positioning and movements of a stage platform, while generating reduced stray magnetic-field fluctuations and perturbations. The stage apparatus include at least one linear motor having a stator and a moving coil. Each stator includes a yoke that includes linear arrays of permanent magnets relative to which the moving coil, attached to the stage platform, moves inside a linearly extended coil gap in the yoke. A magnetic-shield plate extends around all outer surfaces and edges of the yoke as well adjacent the coil gap. The magnetic-shield plate is made of a magnetic material having high magnetic permeability.
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申请公布号 |
US2003155820(A1) |
申请公布日期 |
2003.08.21 |
申请号 |
US20030367379 |
申请日期 |
2003.02.14 |
申请人 |
KABUSHIKI KAISHA YASKAWA DENKI |
发明人 |
TOMINAGA RYUICHIROU;TAMAI MASAFUMI;TANAKA KEIICHI |
分类号 |
G12B5/00;F16C32/06;G03F7/20;H01L21/027;H02K5/00;H02K7/08;H02K11/00;H02K41/02;H02K41/03;(IPC1-7):H02K41/00 |
主分类号 |
G12B5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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