发明名称 |
REACTOR ASSEMBLY AND PROCESSING METHOD |
摘要 |
A reactor assembly and processing method for treating a substrate generally includes a base unit, a chuck assembly, a process chamber, an inlet manifold assembly and an exit manifold assembly. The inlet manifold assembly is in fluid communication with a first opening of the process chamber, wherein the inlet manifold assembly comprises a flow-shaping portion adapted to laterally elongate a gas and/or a reactant flow into the process chamber. The exhaust manifold assembly in fluid communication with a second opening of the process chamber and is diametrically opposed to the inlet manifold assembly. The process includes flowing a gas and/or reactive species into the process chamber of the reactor assembly in a direction that is about planar with the substrate surface providing improved uniformity and increased reactivity. |
申请公布号 |
WO03067635(A2) |
申请公布日期 |
2003.08.14 |
申请号 |
WO2003US03998 |
申请日期 |
2003.02.10 |
申请人 |
AXCELIS TECHNOLOGIES, INC. |
发明人 |
KINNARD, DAVID;FERRIS, DAVID |
分类号 |
H01L21/3065;C23C16/44;C23C16/455;H01L21/31 |
主分类号 |
H01L21/3065 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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