发明名称 |
Piezoelectric actuator for generating rotating, tilting and sliding motion around a fixing point e.g. for hard disc drive, has a shear oscillator with connection electrodes. |
摘要 |
A shear oscillator (SO) is designed like a plate. The longitudinal sides of the plate are each firmly connected to a metal body or a metal foil that are set above a spiral spring link. As a result, the SO maintains a mechanical contact with a carrier. The polarizing direction of the SO runs parallel to the longitudinal sides of the plate as well as parallel to an electrical field.
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申请公布号 |
DE10210257(A1) |
申请公布日期 |
2003.08.14 |
申请号 |
DE20021010257 |
申请日期 |
2002.03.08 |
申请人 |
PHYSIK INSTRUMENTE (PI) GMBH & CO. KG |
发明人 |
PERTSCH, PATRICK |
分类号 |
H01L41/09;H02N2/04;(IPC1-7):H02N2/04 |
主分类号 |
H01L41/09 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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