发明名称 Piezoelectric actuator for generating rotating, tilting and sliding motion around a fixing point e.g. for hard disc drive, has a shear oscillator with connection electrodes.
摘要 A shear oscillator (SO) is designed like a plate. The longitudinal sides of the plate are each firmly connected to a metal body or a metal foil that are set above a spiral spring link. As a result, the SO maintains a mechanical contact with a carrier. The polarizing direction of the SO runs parallel to the longitudinal sides of the plate as well as parallel to an electrical field.
申请公布号 DE10210257(A1) 申请公布日期 2003.08.14
申请号 DE20021010257 申请日期 2002.03.08
申请人 PHYSIK INSTRUMENTE (PI) GMBH & CO. KG 发明人 PERTSCH, PATRICK
分类号 H01L41/09;H02N2/04;(IPC1-7):H02N2/04 主分类号 H01L41/09
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