发明名称 |
ELECTROSTATIC TRAP FOR PARTICLES ENTRAINED IN AN ION BEAM |
摘要 |
A system for inhibiting the transport of contaminant particles with an ion beam includes a pair of electrodes that provide opposite electric fields through which the ion beam travels. A particle entrained in the ion beam is charged to a polarity matching the polarity of ion beam when traveling through a first of the electric fields. The downstream electrode provides another electric field for repelling the positively charged particle away from the direction of beam travel. |
申请公布号 |
KR20030064748(A) |
申请公布日期 |
2003.08.02 |
申请号 |
KR20037003082 |
申请日期 |
2003.02.28 |
申请人 |
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发明人 |
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分类号 |
H01L21/265;H01J3/40;H01J37/02;H01J37/30;H01J37/317 |
主分类号 |
H01L21/265 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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