HIGH-DIELECTRIC THIN-FILM CAPACITOR AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a capacitor using a dielectric thin film of a high dielectric constant and having a small leakage current and a high dielectric breakdown voltage. SOLUTION: This high-dielectric thin-film capacitor is manufactured in such a way that an upper electrode and a lower electrode are respectively formed on the upper and the lower faces of the high-dielectric thin film, wherein the high-dielectric thin film having a perovskite structure is predominantly oriented to the (111) plane, the upper and the lower electrodes on the high-dielectric thin film have a face-centered cubic structure, the electrode thin films are predominantly oriented to the (111) plane, and the high-dielectric thin film is formed at a temperature of 300°C or lower. COPYRIGHT: (C)2003,JPO