发明名称 Polishing tool and polishing apparatus
摘要 A polishing tool is used for polishing a workpiece in a state such that the workpiece is pressed against and brought into sliding contact with the polishing tool. The polishing tool is formed of thermoplastic resin having an average glass transition temperature (Tg) ranging from 270 K to 400 K. The thermoplastic resin includes a first phase having a low glass transition temperature (Tg) of 320 K or lower within a range of from 10 weight % to 90 weight %, and a second phase having a high glass transition temperature (Tg) of 320 K or higher within a range of from 90 weight % to 10 weight %.
申请公布号 US2003143931(A1) 申请公布日期 2003.07.31
申请号 US20030352852 申请日期 2003.01.29
申请人 HIROKAWA KAZUTO;SAKABE HIROSHI 发明人 HIROKAWA KAZUTO;SAKABE HIROSHI
分类号 B24B7/22;B24D3/28;B24D7/02;(IPC1-7):B24B7/22 主分类号 B24B7/22
代理机构 代理人
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