OBSERVATION METHOD FOR SCANNING SECONDARY ELECTRON MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To detect an optimum condition used to measure a two-dimensional distribution of hydrogen atoms in AlGaAs or GaAs by using a secondary electron microscope.

SOLUTION: When secondary electrons emitted by the irradiation with an electron beam at an accelerating voltage of 3 kV or less are observed, an image whose contrast is satisfactory is obtained. An irradiation current of 0.1 nA or more is preferable.

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