| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of an insulating film, having sufficiently a high insulating property in an insulation film forming method which uses a mutual adsorption method, where an expensive vacuum facility is not required and a large coating is easily formed. SOLUTION: In the manufacturing method of the insulating film by a mutual lamination method, where a substrate is mutually brought into contact with polycation electrolytic water-soluble polymer aqueous solution and polyanion electrolytic water-soluble polymer aqueous solution at the time of forming the insulating film on the substrate, two types of polymers are made to mutually adsorb, an accumulated polymer layer is formed and the accumulated polymer layer is set to be the insulating film by a heating processing. Each layer in two types of polymers is laminated, and heat treatment is performed at the temperature of not lower than the rising temperature of a peak part, having a glass transfer temperature of a higher temperature side in two glass transfer temperatures, in the curve for the temperature of the mixture of two types of polymers and the heat absorption quantity. COPYRIGHT: (C)2003,JPO
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