PROJECTION OPTICAL APPARATUS

摘要

PROBLEM TO BE SOLVED: To efficiently collect light spreading from a reflective image constitution device to a post-stage projection lens.

SOLUTION: A condenser lens 5 is arranged between the reflective image constitution device 6 and a wire grid polarization split device 4 to make incident light to the reflective image constitution device 6 nearly parallel. The photoelastic coefficient of the condenser lens 5 is set to be äB(10-12×Pa)}<1.0 (unit: nm/cm/105Pa). When the incident diameter ϕ of the projection lens 7 where the light of an image from the reflective image constitution device 6 is made incident is increased and the lengths of the two sides of the rectangular image constitution surface of the device 6 are set to be a and b (b: the length of an edge nearly parallel to the optical axis of the projection lens 7), (b+b/3)<ϕ<(b+b/2) is formed in the case of a≤b and (a+b/3)<ϕ<(a+b/2) is formed in the case of a>b. A retarder device is provided between the reflective image constitution device 6 and the wire grid polarization separation device 4 to retard an optional polarization component by a phase fixed selectively and previously.

COPYRIGHT: (C)2003,JPO