发明名称 Push/pull actuator for microstructures
摘要 A relay for switching an electrical signal includes switching elements, an actuator for closing the switch, and an actuator for opening the switch, the latter two of which are mechanically decoupled when the relay is in a mechanical rest position. When a relay close signal is applied, the closing actuator electrostatically drives the switching elements to complete a signal path between two terminals for the switched signal. In the process of closing the switch, the opening actuator remains stationary, i.e., no mass is displaced. Application of a switch open signal electrostatically drives the opening actuator, optionally in combination with a mechanical restoring force on the closing actuator, to open the switch to break the signal conduction path for the switched signal.
申请公布号 US2003132090(A1) 申请公布日期 2003.07.17
申请号 US20020322941 申请日期 2002.12.18
申请人 ADAMS SCOTT G.;MILLER SCOTT A. 发明人 ADAMS SCOTT G.;MILLER SCOTT A.
分类号 B81B3/00;H01L21/762;(IPC1-7):H01H3/00 主分类号 B81B3/00
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