| 摘要 |
PROBLEM TO BE SOLVED: To provide a member for ozone generation, which, in large quantity, detoxifies harmful gases such as fluorine or chlorine, having excellent corrosion resistance to the harmful gases, and not generating heat. SOLUTION: In the member 1 for ozone generation, an electrode 3 is embedded in a ceramic plate 2 made of a aluminum-nitride sintered compact or alumina sintered compact, both of which have a porosity of≤3% and a heat conductivity of≥30 W/m.K. Each of distances T from the electrode 3 to one main surface of the ceramic plate 2 and to the other main surface of the ceramic plate 2 is made 0.3-1 mm. An ozone generator is so composed that three or more of the members 1 for ozone generation are arranged in parallel. AC power is applied, in an oxygen-containing atmosphere, to the electrode 3 embedded in each of the members 1 to generate plasma, so that the ozone is generated. COPYRIGHT: (C)2003,JPO
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